Juergen Daleiden; Amer Tarraf; Soeren Irmer; Friedhard Römer; Cornelia Prott; Edwin Ataro; Martin Strassner; Hartmut H. Hillmer
(spiedigitallibrary, 2003-10-01)
Ultra-widely tunable microcavity devices implemented by surface micromachining are studied. We model, fabricate, and characterize 1.55-μm vertical-resonator-based optical filters and vertical cavity surface emitting lasers ...